既有半導體廠潔淨室之節能改善與效益分析

Abstract

既有半導體廠在動態運轉狀況下，仍需持續不斷進行能源效率查核，透過系統診斷，改善系統運轉效率，以降低能源成本。 本研究對半導體二個系統進行能源效率評估與改善： （1）評估增設儲冷式空調，轉移尖峰時段用電，以取得電力公司的電費價差。規劃2,000RTH儲冷空調系統，節省電費862,288元/年，工程投資7,415,000元，投資回收年限8.6年。

（2）規劃改善潔淨室乾盤管輸水系統，2台100馬力離心式泵浦，由原全量輸出運轉，規劃加裝2台變頻器，可節省46%電力輸出，節省電力成本1,349,040元/年，投資回收年限1.12年。

Existing foundry’s fab. in the dynamic operating conditions, still on-going energy efficiency audit, through the system diagnostics to improve operational efficiency of the system to reduce energy costs. In this study, two systems for foundry’s fab. to improve the energy efficiency assessment: （a）Assessment of additional TES air-conditioning, load shifting of electricity during peak hours in order to obtain TPC preferential rates. Planning 2,000 RTH TES air conditioning system, saving electricity cost 862,288 NTD / year, NTD7,415,000 project investment, the ROI limit in 8.6 years.

（b）Planning to improve the clean room dry coil system, 2 sets of 100 hp centrifugal pump, the original total output operation, planning to install two invertors can save 46% power output, saving electricity costs 1,349,040 NTD/ year, the ROI limit in 1.12 years.