標題: HIGH-TEMPERATURE STABILITY OF PLATINUM SILICIDE ASSOCIATED WITH FLUORINE IMPLANTATION
作者: TSAI, JY
TSUI, BY
CHEN, MC
交大名義發表
電控工程研究所
National Chiao Tung University
Institute of Electrical and Control Engineering
公開日期: 1-Apr-1990
URI: http://dx.doi.org/10.1063/1.345327
http://hdl.handle.net/11536/4143
ISSN: 0021-8979
DOI: 10.1063/1.345327
期刊: JOURNAL OF APPLIED PHYSICS
Volume: 67
Issue: 7
起始頁: 3530
結束頁: 3533
Appears in Collections:Articles