應用紅外線熱影像儀於製程機台電氣設備之預知保養研究-以某TFT-LCD廠為例

Abstract

製程設備之電氣設施一旦發生異常，不僅會造成機台當機，導致製程中斷影響產能，若引發電氣火災，還會破壞無塵室潔淨度，並威脅作業人員生命安全。本研究以TFT-LCD廠製程設備之電氣設施為對象，以紅外線熱影像儀對ARRAY、CELL、MDL各製程設備之電氣設施進行檢測，以找出設備電氣設施失效原因，提供預防對策，並提供製程機台電氣設施進行紅外線熱影像作業之建議。 依本研究檢測結果統計，最常發生異常之元件為端子台；造成溫度異常的原因以接觸不良比例最高。觀察歷次檢測結果可發現，藉由紅外線熱影像儀進行機台電氣設備之預知保養後，機台異常百分比確實有降低之趨勢。

We take array, cell, mdl Process equipment of TFT-LCD as the example. Using infrared thermography to detection, to find out fault reason , to propose preventive, and advanced suggestion which apply infrared thermography to predictive maintenance of machine electrical equipment. The experimental results have shown. Terminal block is inside all electronic component most often occurs fault. Most of reson that Cause temperature abnormality is the bad contact. The results revealed that after application of infrared thermography to predictive maintenance of machine electrical equipment, the fault probability reduce indeed .