應用非均勻矽鍺奈米線在生物感測器上提升其靈敏度

Abstract

近年來矽奈米線已被廣泛的應用在生物、化學感測方面。相較於其它感測器，矽奈米線擁有許多優點，例如：矽奈線是即時反應，一旦環境中有待測分子，矽奈米線會立即鍵結住，透過電流變化便可知環境有此分子存在。還有，矽奈米線可偵測濃度非常低的分子，不用透過萃取的方式使濃度增高，便可進行偵測的動作。在此論文中，我們利用半導體製程技術來形成矽鍺奈米線，利用矽鍺氧化鍺析出現象，將鍺析出在奈米線外層，讓矽鍺奈米線形成非均勻，並討論不同的氧化溫度、時間對靈敏度的變化，最後並証實非均勻矽鍺奈米線比均質矽鍺奈米線有較好的感測能力。

In recent years , Si nanowire has been used for sensors extensively in biology and chemistry . Comparing with other sensors, Si nanowire has many advantages . For example, Si nanowire is real-time detection, and as soon as the molecule that we want to detect appears in the environment, Si nanowire will bind it. When current change, we can know that the molecule exist in the environment. Moreover, Si nanowires can detect molecule whose concentration can be very low. We don’t need extracting it. In this thesis, we used semiconductor integrated techniques to form SiGe nanowires. Using a Ge condensation technique, Ge will condense on the outer side of nanowire forming non-homogeneous SiGe nanowire, and we discuss different oxidation temperature and time versus sensitivity change. Eventually, we prove that non-homogeneous SiGe had better sensing ability than uniform SiGe nanowire.