以產品為基礎之適應性干擾估測器用於半導體製程之批次控制

Abstract

近年來，批次控制技術已被充分發展並且應用於半導體製造過程中，維持製程水準並改善產品良率。現今半導體廠內單一機台上必定有多種不同產品同時進行同一道製程工作，在這種少量多樣化的製程環境中，可能因為產品過久未於機台上生產而找不到最佳的輸入值，導致產品輸出未能在期望的規格範圍之內使得產線的良率降低。 本論文對上述少量多樣化的生產情形提出一控制策略，在混貨機制下各產品的干擾值分布，可以大略推斷干擾項與各產品和機台的組合有關，可將其干擾值拆解成一截距項與一漂移量，將截距項的變異歸於各產品間變異所產生，而漂移量歸於機台與產品間交互作用所貢獻，利用PBADE控制架構，不斷的更新該模型並計算出下一片製程之輸入值，使輸出值靠近所期望的目標值，達到控制單一機台多產品之混貨製程的目的。

In the last few years, Run-to-Run (RtR) control techniques have been developed and used to semiconductor manufacturing processes to maintain process targets and improve product quality. There are many different products entering one tool to proceed the same process in Fab nowadays. In this high-mix situation, it is hard to find out the optimal recipe for some products, which did not process in the tool for a long time. This situation leads to the outputs of the products locating outside of the desired specification and decrease the yield. There is a control strategy for the high-mix process situation in the thesis. In this situation, this thesis considers that the disturbances are related to the combination of the products and the tool. This study separates the disturbances into one intercept and one value of drift. It is assumed that the different intercepts are related to the variation of the products, and the sizes of drift are related to the interaction between the tool and the product. This thesis designs a PBADE controller, continuously updates the model and calculates the recipe for the next run, approaching the output to the target and achieving the goal for controlling mixed product process of one tool and multi-product.