基於奈米柱在十二對稱準光子晶體共振腔雷射熱特性

Abstract

電激發與連續性操作是目前光子晶體共振腔雷射所需解決的兩個重大課題。在本論文中，為了達到以上兩個目的，我們設計了結合奈米柱結構且具有耳語廊模態之電激發十二對稱準光子晶體共振腔雷射。在本論文中，我們首先用有效元素分析法模擬在不同奈米柱大小與傾斜度下之熱傳導行為，並探討受奈米柱結構影響下熱特性之改善。我們並針對奈米柱大小在不同的半徑晶格常數比與空氣孔洞半徑下之製程作探討。此外，藉由分析在不同基板溫度與工作週期下之量測結果，我們發現越大的奈米柱體積擁有越好的散射效果，而此一結果充分證實了奈米柱結構具有可連續性操作之潛力。

此外，我們成功製作出奈米柱結構電激發光子晶體共振腔雷射，並解決了許多製程中所遇到的困難，如大面積柱狀平台之製程、如何將光子晶體定義在柱狀平台上、最後的奈米柱製程等。在量測方面，我們探討了元件的基本電性，及光激光譜和電激光譜間的比較。而最後我們在波長1526 nm與1545nm處觀察到了電激發光之耳語廊模態共振行為。

Electrically-driven and continuous-wave operation are two challenge to photonic crystal microcavity laser, in this thesis, we design 12-fold quasi-photonic crystal microcavity on the nano-post structure with whispering-gallery mode. First, we use finite element method to simulate the heat transfer behavior of nano-post structure with different nano-post sizes and post tilted angles to investigate the thermal properties improvement by nano-post. In fabrication, we can control the nano-post size with respect to different r / a ratio and air-hole radius. Also, by measurement results with different substrate temperature and pump duty cycle, we find the larger post volume will provide better thermal properties, and it can verify the potential of nano-post structure in continuous-wave operation. Additionally, we have finished the fabrication processes of electrically-driven 12-fold QPC D2 microcavity and solved many problems in fabrication, such as the large post formation with PR filling, 12-fold quasi-photonic crystal microcavity pattern definition, nano-post formation with appropriate size, etc. In the measurement, we investigate the basic electrical properties of this structure. Besides, the electro-luminescence and photo-luminescence spectra of device are obtained and compared with each other. Finally, the electro-luminescence of whispering-gallery mode resonance at 1526 and 1545 nm are observed based on this nano-post structure.