三氧化鎢/氧化銥全固態元件於低溫及天然氣感測之研究

Abstract

本論文的主要內容介紹，是以三氧化鎢/氧化銥全固態二極體元件分別在低溫環境下以及天然瓦斯下的感測。本元件工作機制，是由於三氧化鎢與氧化銥薄膜都是雙載子注入，而我們所濺鍍出來的氧化銥薄膜內可能含有氫離子，當氫離子進入薄膜內與外加的偏壓下，會使薄膜產生可逆式的氧化還原反應。實驗結果顯示：於低溫環境下，Vonset 會隨溫度的降低而增大；於天然氣感測方面，當我們於三氧化鎢薄膜表面添加微量銥金屬微粒，能夠有效改善元件靈敏度。注射天然瓦斯也將使得元件整體電性受到影響，不同濃度的天然瓦斯便能量測到不同電流值，此種感測器可感測不同濃度天然瓦斯。

The main research of this article was about the solid-state diode based on WO3 / IrO2 , which in low temperature state and natural gas sensing . The mechanism of the device was based on double injection, which IrO2 thin film may have H+. When we plus e－and H+,the diode in the reversible redox reaction.The experiment results show that：The Vonset increasing as the temperature decreasing when putting the diode device into the low temperature equipment setup. And in the gas sensing study, the sensitivity will be improved when we doped small amount of iridium.The electric property will be affected when injected the devices with natural gas. We can determine the concentration of natural gas by measuring current.