TFT-LCD前段Array廠及中段Cell廠AMHS流場改善研究

Abstract

本文是要解決一個裝置於TFT-LCD無塵等級Class 1000之Fab內，連接前段無塵等級Class 100的Array製程及無塵等級Class 100、Class 10的Cell製程中AMHS Stocker微塵粒污染問題，由於AMHS Stocker設計之初疏忽與現場無塵廠房的安裝失誤，Stocker防塵外罩頂之Class 100過濾能力的FFU無法完全蓋住該外罩，有3/4面積裸露在Class 1000等級的外面環境中，故形成Stocker密封空間內氣流及換氣能力不足，使得微塵粒子沉積滯留於Class 100等級要求的空間中，造成面板玻璃面的微塵粒污染，使各製程中的不良率居高不下造成損失。本研究主要目的依據實驗現象中總結出來的紊流k-ε模型，它是個半經驗的公式，因適用範圍廣，經濟合理的精度所以在工業流場中廣泛被使用，經由軟體進行數值模擬分析，分別去探討Stocker內各儲位中Cassette內面板玻璃間的流場均勻性，流場中空氣年齡及壓力的變化。並利用由實體Stocker內部空間經定位標示後，量得的流速、方向及微塵粒分佈狀況與模擬值比對，找出誤差範圍判定其合理性；後再返回由軟體模擬解決FFU外露的有效改善對策，要使改善後的AMHS Stocker內的微塵粒能順暢置換排出，維持空氣年齡值合乎業界Class 100的對應值以內，並重新評估FFU滿佈的必要性，以降低以後營運的維修成本。

The aim of this study is to solve a device in TFT-LCD class 1000 Fab clean room to connect front-end cleanliness Class 100 of the Array process and the cleanliness Class 100、Class 10 of the Cell process AMHS stocker dust particles pollution problems. Because AMHS stocker at the beginning of design negligence and on-site installation errors, Stocker dustproof jacket ceiling Class 100 filter FFU is unable to cover this shell completely, has 3/4 area to expose in the Class 1000 cleanliness environment. Causes in the Stocker seal space the air flow non-uniform and air change ability is insufficient, so that dust particles deposition to be remained in the Class 100 cleanliness environment, Panel glass surface caused by the dust particle pollution. It makes the manufacturing process for high rate of bad losses. This research main purpose needs to use the turbulent flow k-ε model which summarizes from the experiment phenomenon, it is a semi-empirical formula, as applicable to a wide range of economic and reasonable accuracy, therefore is used widely in the industry flow field, carries on the numerical simulation analysis , to look at stocker in cassette storage spaces inside cassette flow field uniformity between the plate glass, in the flow field the air age and the pressure change. And use the stocker inner space after the localization indication, the measurement of the velocity, direction and distribution of fine dust particles compared with the simulated values to identify the error to determine the scope of its legitimacy; then putting it back to solve the FFU exposed to effectively improve the response. After improve, in the AMHS Stocker dust particle can discharge smoothly, the maintenance air age value conforms with in the industry class, the corresponding value of the cleanliness Class 100 or less and re-evaluate the need for FFU 100% covered to reduce maintenance costs after the operation.