ERROR REDUCTION IN THE ELLIPSOMETRIC MEASUREMENT ON THIN-FILMS

Title:	ERROR REDUCTION IN THE ELLIPSOMETRIC MEASUREMENT ON THIN-FILMS
Authors:	HO, JH LEE, CL LEI, TF 交大名義發表電控工程研究所 National Chiao Tung University Institute of Electrical and Control Engineering
Issue Date:	1-Aug-1988
URI:	http://hdl.handle.net/11536/4501
ISSN:	0038-1101
Journal:	SOLID-STATE ELECTRONICS
Volume:	31
Issue:	8
Begin Page:	1321
End Page:	1326
Appears in Collections:	Articles