ERROR REDUCTION IN THE ELLIPSOMETRIC MEASUREMENT ON THIN-FILMS

標題:	ERROR REDUCTION IN THE ELLIPSOMETRIC MEASUREMENT ON THIN-FILMS
作者:	HO, JH LEE, CL LEI, TF 交大名義發表電控工程研究所 National Chiao Tung University Institute of Electrical and Control Engineering
公開日期:	1-Aug-1988
URI:	http://hdl.handle.net/11536/4501
ISSN:	0038-1101
期刊:	SOLID-STATE ELECTRONICS
Volume:	31
Issue:	8
起始頁:	1321
結束頁:	1326
Appears in Collections:	Articles