應用於微型陀螺儀之差動式電容感測電路

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DC Field	Value	Language
dc.contributor.author	毛志強	en_US
dc.contributor.author	邱俊誠	en_US
dc.date.accessioned	2014-12-12T01:41:56Z	-
dc.date.available	2014-12-12T01:41:56Z	-
dc.date.issued	2003	en_US
dc.identifier.uri	http://140.113.39.130/cdrfb3/record/nctu/#GT009112596	en_US
dc.identifier.uri	http://hdl.handle.net/11536/45523	-
dc.description.abstract	本論文之目的在探討電容式微陀螺儀之感測電路的理論與實際應用。首先針對環狀振動式微陀螺儀的架構作分析，接著在介紹目前被廣泛應用在電容感測電路的同步偵測電路、切換式電容感測電路與全差動式電容感測電路。不過由於外界因素的不匹配與微陀螺儀本身結構上的限制，使得這三種架構不適用於本論文所討論的應用中。因此，本論文以差動式電荷放大器的概念為基礎設計出差動式電容感測電路。在利用TSMC 0.35μm Mixed-Signal 2P4M Polycide 3.3/5V製程佈局後之模擬結果可看出，差動式電容感測電路具有高度的線性度與靈敏度，利於配合微型陀螺儀形成一完整系統。	zh_TW
dc.language.iso	zh_TW	en_US
dc.subject	電容感測電路	zh_TW
dc.subject	微機電	zh_TW
dc.subject	陀螺儀	zh_TW
dc.subject	Capacitive Sensing Circuit	en_US
dc.subject	MEMS	en_US
dc.subject	Gyroscope	en_US
dc.title	應用於微型陀螺儀之差動式電容感測電路	zh_TW
dc.title	The Design, Simulation and Fabrication of Differential Capacitive Sensing Circuits of Micro Gyroscope	en_US
dc.type	Thesis	en_US
dc.contributor.department	電控工程研究所	zh_TW
Appears in Collections:	Thesis

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