標題: | A NEW OXIDATION-RESISTANT SELF-ALIGNED TISI2 PROCESS |
作者: | TSENG, HH WU, CY 工學院 College of Engineering |
公開日期: | 1-十一月-1986 |
URI: | http://hdl.handle.net/11536/4704 |
ISSN: | 0741-3106 |
期刊: | IEEE ELECTRON DEVICE LETTERS |
Volume: | 7 |
Issue: | 11 |
起始頁: | 623 |
結束頁: | 624 |
顯示於類別: | 期刊論文 |