標題: A NEW OXIDATION-RESISTANT SELF-ALIGNED TISI2 PROCESS
作者: TSENG, HH
WU, CY
工學院
College of Engineering
公開日期: 1-Nov-1986
URI: http://hdl.handle.net/11536/4704
ISSN: 0741-3106
期刊: IEEE ELECTRON DEVICE LETTERS
Volume: 7
Issue: 11
起始頁: 623
結束頁: 624
Appears in Collections:Articles


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