THE EFFECT OF FILM THICKNESS ON THE ELECTRICAL-PROPERTIES OF LPCVD POLYSILICON FILMS

Title:	THE EFFECT OF FILM THICKNESS ON THE ELECTRICAL-PROPERTIES OF LPCVD POLYSILICON FILMS
Authors:	LU, NCC LU, CY LEE, MK SHIH, CC WANG, CS REUTER, W SHENG, TT 電控工程研究所 Institute of Electrical and Control Engineering
Issue Date:	1984
URI:	http://hdl.handle.net/11536/4870
ISSN:	0013-4651
Journal:	JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume:	131
Issue:	4
Begin Page:	897
End Page:	902
Appears in Collections:	Articles

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