TUNGSTEN SILICIDE PREPARED BY COEVAPORATION OF W AND SI SUBSTANCES

標題:	TUNGSTEN SILICIDE PREPARED BY COEVAPORATION OF W AND SI SUBSTANCES
作者:	CHEN, MC JOHN, DY 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
公開日期:	1984
URI:	http://hdl.handle.net/11536/4887
ISSN:	0013-4651
期刊:	JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume:	131
Issue:	3
起始頁:	C87
結束頁:	C87
Appears in Collections:	Articles