Growth of carbon nanotube field emitters in the triode structure using anodic aluminum oxide as the template

Abstract

Carbon nanotubes (CNT) were grown in anodic aluminum oxide (AAO) and used as field emitters in a triode structure. To fabricate the field-emission triode structure, nanoporous anodic aluminum oxide (AAO) thin layer was first prepared on the Si(100) substrate, followed by the growth of vertically aligned carbon nanotubes in AAO pore channels by electron cyclotron resonance chemical vapor deposition (ECR-CVD). The SiO2 dielectric and Al gate electrode layers required for the triode structure were directly deposited on the CNTs. Reactive ion and wet etches were then used to open the field-emission area in the triode. Scanning electron microscopy and Raman spectroscopy studies revealed that damage to CNT emitters in the etched area was trivial. Field-emission characteristics of the CNT emitters have been studied and an anode turn-on electric field of similar to 8.05 V/mu m was measured. (C) 2007 Elsevier B.V. All rights reserved.