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DC FieldValueLanguage
dc.contributor.authorLEE, MKen_US
dc.contributor.authorLU, CYen_US
dc.contributor.authorSHIH, CTen_US
dc.date.accessioned2014-12-08T15:06:22Z-
dc.date.available2014-12-08T15:06:22Z-
dc.date.issued1983en_US
dc.identifier.issn0013-4651en_US
dc.identifier.urihttp://hdl.handle.net/11536/4943-
dc.language.isoen_USen_US
dc.titleBELT TRANSPORT CVD PROCESSINGen_US
dc.typeArticleen_US
dc.identifier.journalJOURNAL OF THE ELECTROCHEMICAL SOCIETYen_US
dc.citation.volume130en_US
dc.citation.issue11en_US
dc.citation.spage2249en_US
dc.citation.epage2252en_US
dc.contributor.department電控工程研究所zh_TW
dc.contributor.departmentInstitute of Electrical and Control Engineeringen_US
dc.identifier.wosnumberWOS:A1983RQ24800021-
dc.citation.woscount4-
Appears in Collections:Articles


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