POST-EPITAXIAL POLYSILICON AND SI3N4 GETTERING IN SILICON

標題:	POST-EPITAXIAL POLYSILICON AND SI3N4 GETTERING IN SILICON
作者:	CHEN, MC SILVESTRI, VJ 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
公開日期:	1982
URI:	http://hdl.handle.net/11536/4954
ISSN:	0013-4651
期刊:	JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume:	129
Issue:	6
起始頁:	1294
結束頁:	1299
Appears in Collections:	Articles

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