A MODEL FOR THE DEPOSITION OF PHOSPHORUS IN SILICON

Title:	A MODEL FOR THE DEPOSITION OF PHOSPHORUS IN SILICON
Authors:	GUO, SF 電控工程研究所 Institute of Electrical and Control Engineering
Issue Date:	1982
URI:	http://hdl.handle.net/11536/4985
ISSN:	0013-4651
Journal:	JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume:	129
Issue:	3
Begin Page:	C101
End Page:	C101
Appears in Collections:	Articles