標題: SI EPITAXIAL QUALITY IMPROVEMENT BY POST-EPI POLY-SI GETTERING
作者: CHEN, MC
SILVESTRI, VJ
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 1981
URI: http://hdl.handle.net/11536/5033
ISSN: 0013-4651
期刊: JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume: 128
Issue: 3
起始頁: C107
結束頁: C107
Appears in Collections:Articles