PRE-OXIDATION GETTERING OF OXIDATION-INDUCED STACKING-FAULTS IN SILICON BY THE PHOSPHORUS DIFFUSION PROCESS

標題:	PRE-OXIDATION GETTERING OF OXIDATION-INDUCED STACKING-FAULTS IN SILICON BY THE PHOSPHORUS DIFFUSION PROCESS
作者:	CHEN, JH CHEN, MC 電控工程研究所 Institute of Electrical and Control Engineering
公開日期:	1979
URI:	http://hdl.handle.net/11536/5098
ISSN:	0020-7217
期刊:	INTERNATIONAL JOURNAL OF ELECTRONICS
Volume:	47
Issue:	6
起始頁:	555
結束頁:	560
Appears in Collections:	Articles