雷射菲索干涉儀的研製

Full metadata record

DC Field	Value	Language
dc.contributor.author	王瑞陽	en_US
dc.contributor.author	WANG, RUI-YANG	en_US
dc.contributor.author	郭義雄	en_US
dc.contributor.author	GUO, YI-XIONG	en_US
dc.date.accessioned	2014-12-12T02:02:55Z	-
dc.date.available	2014-12-12T02:02:55Z	-
dc.date.issued	1984	en_US
dc.identifier.uri	http://140.113.39.130/cdrfb3/record/nctu/#NT732123005	en_US
dc.identifier.uri	http://hdl.handle.net/11536/51925	-
dc.description.abstract	本文目的主要在於探討與研製雷射菲索（Fizeau）干涉儀，如何使其得到最佳干涉條紋的精確度與明晰度度，及在這種要求下系統設計的條件。把所研製的此一系統，用１來作為即時（real-time ）測量半導體晶體片的平整度；其精確度可達──波長，而１０測量截面的直徑可寬至7.62公分。	zh_TW
dc.language.iso	zh_TW	en_US
dc.subject	雷射菲索	zh_TW
dc.subject	干涉儀	zh_TW
dc.subject	即時	zh_TW
dc.subject	半導體	zh_TW
dc.subject	晶體片	zh_TW
dc.subject	FIZEAU	en_US
dc.subject	REAL-TIME	en_US
dc.title	雷射菲索干涉儀的研製	zh_TW
dc.type	Thesis	en_US
dc.contributor.department	光電工程學系	zh_TW
Appears in Collections:	Thesis