集積化薄膜平面電感之設計

Abstract

本論文中,首先回顧電感的物理特性,包含電感的成因及電感值的計算公式 o我們使用包括電感,電容及電阻集總等效電路作為量測糢型,並且研製出 校正儀器用的標準器於晶片上,使量測誤差減至最小o我們並建立線圈之電 感,電阻,及品質因子與頻率的關係o此外,對於基板電容和電阻的效應,提 出定性的解釋o我們也提出和製造許多不同圖案的電感器o在相同面積下, 雙層金屬平面電感器比單層金屬平面電感器多 3 - 4倍的電感值o同時,在 映像定理的証明下,磁膜金屬平面電感器可以使單層金屬平面電感器的電 感值增加一倍o In this thesis,the physical characteristics of the inductor, which consists of the origin of the inductance and the calculating formulas of the inductance,are reviewed first.The RLC lumped equivalent circuit is employed as the model of measurement ,and the calibration standards are fabricated on chips to make the measurement deviation as small as possible.We also establish the frequency-dependent relations of coil inductance,resistance and quality factor.In addition,the effects concerning the substrate capacitance and resistance are interpretated.Some integrated inductors with different patterns and structures are proposed.It is found that inductance of th double-metal planar inductors are 3 - 4 times as large as those of the single-metal inductors under the same chip areas.At the same time,the images theory proved that a maximum of 100-percent enhancement effect of the planar inductors on magnetic substrate over the corresponding the single-metal planar inductor.