雙亞胺基鉬錯合物之合成及化學氣相沉積反應

Full metadata record

DC Field	Value	Language
dc.contributor.author	何文郁	en_US
dc.contributor.author	Wen-Yu Her	en_US
dc.contributor.author	裘性天	en_US
dc.contributor.author	Hsin-Tein Chiu	en_US
dc.date.accessioned	2014-12-12T02:10:53Z	-
dc.date.available	2014-12-12T02:10:53Z	-
dc.date.issued	1992	en_US
dc.identifier.uri	http://140.113.39.130/cdrfb3/record/nctu/#NT810500016	en_US
dc.identifier.uri	http://hdl.handle.net/11536/57069	-
dc.description.abstract	本實驗以Mo(tBuN)2Cl2DME為起始物,進而合成新的雙亞胺基鉬錯合物 -[MO(tBuN)2Cl2tBuNH]2,Mo(tBuN)2Cl2Et2NH,Mo(tBuN)2(tBuNH)2.並以 Mo (tBuN)2(tBuNH)2為前驅物以LPCVD沉積法沉積氮化鉬薄膜。並XRD, WDS, Auger ESCA鑑定,最後化學氣相沉積過程中所產生的副產物以NMR, RGA分析並推測可能的反應途徑。	zh_TW
dc.language.iso	zh_TW	en_US
dc.subject	氮化鉬；化學氣相沉積法；多晶型薄膜；雙亞胺基鉬錯合物	zh_TW
dc.subject	molybdenumnitride; Chemical Vapor Deposition ;bisimidomolybdenum	en_US
dc.title	雙亞胺基鉬錯合物之合成及化學氣相沉積反應	zh_TW
dc.title	Synstheses and Chemical Vapor Depositon Reaction of Bisimido lexes	en_US
dc.type	Thesis	en_US
dc.contributor.department	應用化學系碩博士班	zh_TW
Appears in Collections:	Thesis