晶圓廠綁機情境下之光罩派工法則

Abstract

過去光罩派工的研究大部分應用於存貨生產之晶圓廠，該類型的晶圓廠著重產出量的績效表現。本研究針對接單生產之晶圓廠，發展以高達交率為目標之光罩派工法則。此派工法則包含三種基本概念：生產線平衡、避免飢餓以及家族式派工。透過模擬的方式，本研究所提法則與過去方法在不同長短之光罩設置時間下進行比較。實驗的結果顯示本研究所提法則在大部分情況下皆優於過去方法。

Most previous studies on mask scheduling were developed for a make-to-stock system, where throughput is most emphasized. This research develops a mask scheduling algorithm to achieve high hit-rate (on-time delivery rate) for a make-to-order semiconductor fab. The algorithm includes three basic ideas: line-balance, starvation avoidance, and family-based dispatching. The algorithm has been compared to some others by simulation, where experiments are performed in scenarios of various setup times. Results show that the algorithm outperforms previous representative methods in most of the cases.