| 標題: | 聚集性缺失發生在積體電路板製程上之研討 A study on clustered defects in manufacturing processes of integrated circuit industry |
| 作者: | 秦美惠 Qin, Mei Hui 洪志真 Hong, Zhi Zhen 統計學研究所 |
| 公開日期: | 1993 |
| URI: | http://140.113.39.130/cdrfb3/record/nctu/#NT822337007 http://hdl.handle.net/11536/58504 |
| Appears in Collections: | Thesis |
- 晶圓缺陷數與缺陷群聚之管制流程 / 陳佩嵐;PEL-LAN CHEN;堂麗英
- 晶圓缺陷點群聚指標之建立 / 陳大倫;Da-Lun Chen;唐麗英;梁高榮;Lee-Ing Tong
- A neural network-based procedure for the process monitoring of clustered defects in integrated circuit fabrication / Su, CT;Tong, LI
- Constructing control process for wafer defects using data mining technique / Tong, L;Lee, H;Huang, CF;Lin, CK;Yang, CH
- 積體電路生產線上結合缺陷數與缺陷群聚之Hotelling T2多變量管制圖 / 吳炤華;Wu Chao-Hwa;唐麗英;Prof. Lee-Ing Tong
- Monitoring defects in IC fabrication using a hotelling T-2 control chart / Tong, LI;Wang, CH;Huang, CL
- 積體電路生產線上結合缺陷數與群聚指標之Hotelling T2多變量管制圖 / 黃志力;Chih Li Huang;唐麗英;Lee-Ing Tong
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