自動對準矽化鈷技術在極大型積體電路上的應用

Full metadata record

DC Field	Value	Language
dc.contributor.author	陳炳勳	en_US
dc.contributor.author	Chen, Bing Xun	en_US
dc.contributor.author	陳茂傑	en_US
dc.contributor.author	Chen, Mao Jie	en_US
dc.date.accessioned	2014-12-12T02:12:48Z	-
dc.date.available	2014-12-12T02:12:48Z	-
dc.date.issued	1993	en_US
dc.identifier.uri	http://140.113.39.130/cdrfb3/record/nctu/#NT822430016	en_US
dc.identifier.uri	http://hdl.handle.net/11536/58529	-
dc.language.iso	en_US	en_US
dc.title	自動對準矽化鈷技術在極大型積體電路上的應用	zh_TW
dc.title	Self-aligned cobalt silicide technology for ULSI applications	en_US
dc.type	Thesis	en_US
dc.contributor.department	電子研究所	zh_TW
Appears in Collections:	Thesis