Title: 熱電堆原理分析與製程探討
Principles and Fabrication of Thermopile
Authors: 黃柏蔚
Po-Wei Hwang
謝正雄
Jin-Shown Shie
光電工程學系
Keywords: 熱電堆;懸浮板;三明治結構;應力;Thermopile;Floating-membrane;Sandwitch structure;Stress
Issue Date: 1994
Abstract: 本論文研究方向在於利用MOS相容製程,以達高熱阻.熱電材質為多晶矽及
鋁,結構為蜘蛛狀的放射結構.文中從熱電效應的分析P,N型矽seebeck電壓
的計算及元件結構的設計均有研究.實驗以三明治(氮化矽/二氧化矽/氮化
矽)的結構補償應力.應力量測及結構加強是未來努力的方向.
We are using the standard MOS process and anisotropic
etching technology to fabricate a floating-membrane, which is
high thermal resistance. The thermoelectric materials are
polysilicon and aluminum. It is a spidery structure. The
investigation on thermoelectric effect analysis, calculation of
P,N type silicon seebeck voltage and structure design wewe
performed. During floating-membrane forming, the thermal
stress, which could be compensated by sandwitch structure
(Nitride/Oxide /Nitride). To measure stress and enhance
structure is the goal of future fabrication.
URI: http://140.113.39.130/cdrfb3/record/nctu/#NT830123024
http://hdl.handle.net/11536/58877
Appears in Collections:Thesis