矽安裝配件完成光纖與光電元件之自動對準耦合

Abstract

本文主要的工作為製作一簡單使用的安裝配件(submount)，以完成光電元 件與光纖的耦合作業。安裝配件使用的材料為矽晶片，並通過半導體製程 方法完成。配件上將提供自動對準功能，以減短一般耦合程序上耗費的時 間。文中並針對自動對準機制作測試，以了解自動對準的經過與準確度。 最後把安裝配件應用在面射型雷射(SEL)與光纖的耦合包裝，其結果能達 到90％的耦合率。 A simple and useful Si-Submount was constructed and used to finished the coupling between an opto-electronic device and an optical fiber. Submount is made of Si(100)-wafer, in according to the mature silicon fabrication technique. One of its significant function, self-alignment, was to reduce the time consuming during active alignment which was required in case light coupling into an fiber-core. Testing on the accuracy of self-alignment was performed with the submount we made and LED devices. Finally, we conduct the whole self-aligned packaging among SEL device, submount and optical fiber, and obtained an coupling efficiency up to 90％.