標題: Effect of microstructure on the nanomechanical properties of Zn(1-x)Cd(x)Se alloys
作者: Wen, Hua-Chiang
Yang, Chu-Shou
Chou, Wu-Ching
電子物理學系
Department of Electrophysics
公開日期: 15-Jan-2010
摘要: We present a study of the nanoindentation behavior of Zn(1-x)Cd(x)Se epilayers grown using molecular beam epitaxy; the surface roughness, microstructure, and crystallinity were analyzed using atomic force microscopy, cross-sectional transmission electron microscopy, and X-ray diffraction; the hardness H and elastic modulus E were studied using nanoindentation techniques. We found that these highly crystalline materials possessed no stacking faults or twins in their microstructures. We observed a very marked increase in the value of H and a significant decrease in the value of E upon increasing the concentration of Cd, presumably because of an increase in the stiffness of the CdSe bond relative to that of the ZnSe bond. We observed a corresponding shrinkage of the contact-induced damage area for those films having a small grain size and a higher value of H. It appears that resistance against contact-induced damage requires a higher Cd concentration. (C) 2009 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.apsusc.2009.09.059
http://hdl.handle.net/11536/5964
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2009.09.059
期刊: APPLIED SURFACE SCIENCE
Volume: 256
Issue: 7
起始頁: 2128
結束頁: 2131
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