晶圓製造廠主要機種派工法則之設計

Abstract

生產規劃與控制的決策過程中，投料與派工策略的應用可說是影響現場生 產系統成敗的關鍵。本文的主要目的乃是將細部排程所規劃的成果落實於 現場生產控制階段，藉由投料與派工功能的規劃，達到降低在製品水準、 增加產出數量及縮短生產週期時間的目標。吾人基於存貨控制理念，利用 修正後雙界法進行系統投料控制與瓶頸機種之派工控制，而在其他機台的 派工設計上除了加入各主要機種(步進機台、爐管機台、蝕刻機台、離子 植入機台、金屬濺鍍機台)之生產特性外，還配合預測瓶頸機台前在製品 水準進一步從事主要機台之派工。透過現場投料與派工模式之構建，達成 細部排程的規劃目標。經由模擬驗證的分析，運用修正後雙界法控制生產 系統中的投料數量、投料時機與在製品數量，對於改善系統的實際在製品 水準、增加產出數量及縮短生產週期時間，均有實質之成效。 From the viewpoint of production planning and control, the lot release and dispatching rules is one of the main factors that affect the system performance. The objective of this thesis is to fulfill the planning results of the detailed scheduling at the shop floor control stage. In this thesis, the lot release and dispatching rules are designed for each primary machine so as to reduce the WIP level, to increase the output and to shorten the cycle time.Based on the concept of WIP control, this thesis modifies the method of two boundary to control the lot release and to dispatch the parts to the bottleneck machine. For other machines, both the characteristics of the primary machines (Stepper, Oven, Etcher, Implanter and Sputter) and the WIP level in front of the bottleneck machine are considered in the design of dispatching rules.According to the analysis of simulation results, the modified two boundary method can effectively control the lot release quantity and timing, as well as the WIP level. It thus has effects on increasing the system throughput and shortening the cycle time.