含硫化鎘量子點玻璃薄膜之光學性質

Abstract

我們採用RF濺鍍溶膠-凝膠法製成的硫化鎘微晶玻璃靶材,將薄膜鍍於矽晶 片及玻璃基板。由X-射線繞射分析,決定薄膜為六角形wurtzite結構其顆 粒大小約為300埃。在掃描式電子顯微鏡能提供高解析顯微影像,直接看出 薄膜表面生長的情況,其顆粒大小與X-射線測量結果相當。在穿透光譜的 量測,由吸收係數平方對光子能量作圖,可以求得能隙寬,發現顆粒越小藍 位移現象越明顯。拉曼光譜的量測發現硫化鎘微晶玻璃薄膜比靶材有更小 的位移。最後,利用電子探針微區分析儀可以定量分析樣品中鎘原子比硫 原子含量更多。 CdS doped glass thin films were deposited onto SiO and Silicon substrates using RF sputtering techniques。The targets were prepared by sol-gel method。In the X-ray diffraction measurements were pointed out the thin films has hexagonnal wurtzite structure and the size of the crystallite were about 300 which is also conformed by SEM.In the transmission spectra showed the blueshifts increased when the size of the microcrystallites decreases。In the Raman spectra,we found that CdS doped glass thin films compared with target shifted to lower frequency。In the EPMA measurements,the ratio of S and Cd atoms( S/Cd)of the films was estimated to be 0.4~0.8。