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dc.contributor.authorChiou, Jin-Chernen_US
dc.contributor.authorHung, Chen-Chunen_US
dc.contributor.authorLin, Chun-Yingen_US
dc.contributor.authorLin, Yung-Jiunen_US
dc.date.accessioned2014-12-08T15:07:40Z-
dc.date.available2014-12-08T15:07:40Z-
dc.date.issued2010en_US
dc.identifier.issn0021-4922en_US
dc.identifier.urihttp://hdl.handle.net/11536/6032-
dc.identifier.urihttp://dx.doi.org/10.1143/JJAP.49.014201en_US
dc.description.abstractIn this investigation, we present a two dimensional high aspect ratio XY stage, designed as an image stabilizer. This stabilizer is 8 x 8 x 0.75 mm(3), and sufficiently strong to support a suspended image sensor for anti-shaking photographic function. This stabilizer is fabricated by the silicon-on-glass (SOG) process including inductively coupled plasma reactive ion etching (ICP-RIE) processes, in which the anchor layer, pre-etching layer and structure layers are identified without an additional release step as is required in traditional silicon-on-insulator (SOI) wafer etching process. When an actuator is fabricated, flip-chip bonding is adopted to attach a 3 megapixel image sensor to this device. The longest calculated traveling distance of the stabilizer is 25 mu m and special stoppers are designed to prevent the actuator from moving out of range, and sticking to the side by pull-in phenomenon. Accordingly, the applied voltage at the 25 mu m moving distance is 84 V. Furthermore, the dynamic resonant frequency of the actuating device with an image sensor is 1.013 kHz. (C) 2010 The Japan Society of Applied Physicsen_US
dc.language.isoen_USen_US
dc.titleDesign, Fabrication, and Actuation of Micro-Electro-Mechanical System-Based Image Stabilizeren_US
dc.typeArticleen_US
dc.identifier.doi10.1143/JJAP.49.014201en_US
dc.identifier.journalJAPANESE JOURNAL OF APPLIED PHYSICSen_US
dc.citation.volume49en_US
dc.citation.issue1en_US
dc.contributor.department電控工程研究所zh_TW
dc.contributor.departmentInstitute of Electrical and Control Engineeringen_US
dc.identifier.wosnumberWOS:000275607900035-
dc.citation.woscount2-
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