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dc.contributor.author許武憲en_US
dc.contributor.authorXu, Wu-Xianen_US
dc.contributor.author蘇德欽en_US
dc.contributor.authorSu, De-Qinen_US
dc.date.accessioned2014-12-12T02:16:16Z-
dc.date.available2014-12-12T02:16:16Z-
dc.date.issued1995en_US
dc.identifier.urihttp://140.113.39.130/cdrfb3/record/nctu/#NT844124003en_US
dc.identifier.urihttp://hdl.handle.net/11536/61150-
dc.description.abstract本論文提出一種外差光學共軸的技術來量測物體表面的粗糙度，運用這技術的光學機 構並與電腦結合，以達成自動化量測的目地並減少龐大資料處理過程中的單調性，且 能及時顯示測量結果也達到光電系統整合目的。首先利用所調制的電光晶體得到差頻 的目的，參考信號與測試信號之間的相位差是粗的函數，籍由分析這函數可計算出表 面粗糙度值。zh_TW
dc.language.isozh_TWen_US
dc.subject光電工程zh_TW
dc.subject光學zh_TW
dc.subject外差光學共軸zh_TW
dc.subject電光晶體zh_TW
dc.subject參考信號zh_TW
dc.subject測試信號zh_TW
dc.subject光學機構zh_TW
dc.subject自動化量測zh_TW
dc.subject光電系統整合zh_TW
dc.subjectOPTI-ELECTRONIC-ENGINEERINGen_US
dc.subjectOPTICSen_US
dc.title光學外差表面粗糙度測量術zh_TW
dc.titleOptical heterodyne profilometryen_US
dc.typeThesisen_US
dc.contributor.department光電工程學系zh_TW
Appears in Collections:Thesis


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