標題: | 矽化鉬蕭基二極體紅外線感測元件之製程探討 Study of Schottky diode made of Mo Silicide as an Infrared Sensor |
作者: | 黃唯夫 Wei-Fu Huang 謝 正 雄 黃 凱 風 Dr. Jin-Shown Shie Dr. Kai-Feng Huang 電子物理系所 |
關鍵字: | 異方蝕刻;蕭基特接觸;紅外線感測器;anisotropic etching;Schottky barrier;infrared sensor |
公開日期: | 1998 |
摘要: | 本研究旨在利用IC製程並以(111)矽晶片之異方蝕刻技術,研製一溫度感測元件。元件是將鉬蒸鍍在(111)的N型矽晶片上,在經過快速熱退火處理或高溫爐管退火後,使矽晶片與鉬反應形成一矽化鉬之薄膜,且此薄膜與矽晶片本身形成蕭基特接觸,在逆向偏壓下其電流隨溫度的變化率很大,如此可作成蕭基能障熱敏阻體 ,實驗所得的電流溫度係數為9~5%,而熱敏阻常數B值約為4360K。此外,利用特殊之矽(111)異方蝕刻技術,可將元件製作於一封閉浮板,成為一隔熱基板,所以可做成一非常靈敏的紅外線感測器。 This study uses the standard IC process and silicon anisotropic etching technique to fabricate an infrared sensor.This device uses n type silicon combined with Mo-silicide as a Schottky barrier thermistor (SBT),which has very large temperature dependenceof reverse-bias current.It is found that it has large Temperature coefficient of current density (TCJ) values of about 9%~5%,and thermistor constant B values of about 4360K.Besides, to increase the device sensitivity, based on silicon (111) anisotropic etching technique of micromaching, we can fabricate a floating membrane with SBT on it. |
URI: | http://140.113.39.130/cdrfb3/record/nctu/#NT870429014 http://hdl.handle.net/11536/64435 |
Appears in Collections: | Thesis |