陽極氧化製備五氧化二鉭薄膜及其結構與電性研究

Title:	陽極氧化製備五氧化二鉭薄膜及其結構與電性研究 Structure and electrical properties of tantalum pentoxide films prepared by anodic oxidation
Authors:	謝志宏 Hsieh ching hon 謝宗雍 Dr. Hsieh 材料科學與工程學系
Keywords:	五氧化二鉭;陽極氧化法;tantalum pentoxide;anodic oxidation
Issue Date:	1999
Abstract:	以陽極氧化法製備高品質因子的五氧化二鉭薄膜並就其結構與電性量測做研究與討論 disscussion of structure and electrical properties of tantalum pentoxide films prepared by anodic oxidation
URI:	http://140.113.39.130/cdrfb3/record/nctu/#NT880159037 http://hdl.handle.net/11536/65313
Appears in Collections:	Thesis