電磁式微鏡面致動器之研究

Abstract

本研究提出一種電磁式微鏡面致動器元件之設計、模擬與製作方法，並對元件之量測結果加以分析。為了增加微鏡面致動器與半導體製程匹配的能力，本研究以鋁金屬取代傳統金、鉻作為導線材料，並克服了在矽微結構形成後繼續金屬化製程時，旋塗光阻與清洗晶片對矽微結構破壞的困難。元件的接觸窗口與元件之結構形狀在同一道光罩一次完成，故只需使用四道光罩即可完成元件之製作製程，大幅簡化了製程步驟，使得良率與產率亦獲得提升。元件結構之設計朝向低功率消耗、高偏轉角度的方向進行，量測結果顯示，當元件發生共振時，鏡面可偏轉極大的角度，消耗功率則在1mW左右。

The design, fabrication, characterization and modeling of a micromirror actuator driven electromagnetically is described. In order to increase the possibility of intergration, we use aluminum as the material of metal lines. We overcome the difficulty that silicon structure might be destroyed when photoresist coating or wafer cleaning is applied. The pattern of contact holes and device structure are defined by the same mask. As a result, it only needs fours masks to realize the manufacture of the devices. Besides, the throughput and yield are also increased. The measurement shows the characterization of high optical angular deflection and low power consumption(1mW) at resonant frequency. 第二章 元件設計與模擬 第三章 元件製程 第四章 實驗結果與討論 第五章 結論