具三個運動自由度新型微定位平台之研發

Abstract

撓曲式連結件可由單一的材料以一體成形的方式製造而得，使系統無滑動的現象產生，結構上形成了一個無介面摩擦的完美機構。在微定位平台的研發上，為了避免齒隙、黏滯-滑動等一般傳動機構所發生之問題，常利用此特性而採用撓曲式連結件作為其傳動機構之主要連結元件。本文係探討一同時具三自由度(X、Y方向平移﹐Z方向旋轉)之單層微定位平台，透過撓曲式連結件傳送角度與位移，以達到精密定位之目的。在分析的方法上，撓曲式連結件以樑理論結合能量法建立一解析模型，亦利用其分析結果建立平台的運動方程式，並分別比較ANSYS所建立之有限元素模型，最後以實驗印證數值模擬之結果。於撓曲式連結件來說，複合模式分析與ANSYS分析結果近似，且對實驗值之誤差約為15%左右，平台的部分則為ANSYS分析與實驗值幾近吻合。此外，亦可得平台在特性上擁有高線性、低耦合的穩定結構。

Flexure hinges can be manufactured from a single piece of material to provide a monolithic mechanism that eliminates interface wear﹐because there are no sliding pairs. Stages utilizing the deformation of flexure hinges to transfer the motion are able to avoid backlash and stick-slip friction. A novel fine positioning stage with three degrees of freedom was developed in this work. An analytical model based on the combination of the bending moment method and the energy method was derived to study the behavior of this flexure. And stage moving is determined by rigid motion. Also program ANSYS simulated by finite element method. Characteristics of this type of flexure and stage with vary geometry dimension and loading conditions were investigated. Both prototypes are manufactured and the measured characteristics verify the simulated result with about 15% error. A small resolution, good linearity, and negligible coupled motion were obtained.