鎳-鐵-二氧化鈦奈米粉末之複合鍍

Abstract

本研究是採用硫酸鎳-鐵鍍浴，加入納米級陶瓷粉末TiO2，以脈衝微電鑄二氧化鈦強化鎳鐵合金，探討奈米二氧化鈦顆粒強化鎳鐵合金複合電鑄之粉末之分散性.機械性質.結晶位向.電化學性質並利用田口法尋求最佳電鑄參數應用在UV-LIGA高深寬比微模仁之製作。 研究發現利用物理與化學方式提高奈米粉末之分散性，二氧化鈦在水中分散性比在酒精中好，添加二乙基己基硫酸鈉雖是當潤濕劑，但是對二氧化鈦在鍍液的分散有幫助。微硬度與鍍層中的二氧化鈦含量成正比關係，本實驗所得鎳-鐵-二氧化鈦複合鍍層微硬度在800HV左右，比鎳鐵合金硬度580HV明顯增加，而內應力則與二氧化鈦在鍍層中之體積百分率有關，本實驗所得之二氧化鈦體積百分率在2∼4之間，隨著體積百分率的增加鍍層內應力有隨之增加的趨勢。

This research aims to fabricate Ni-Fe-TiO2 composite coating by adding inert nano particle ,TiO2, into Ni-Fe plating bath and electroplated with puls current . Items studied included the distribution of nano TiO2 in Ni-Fe-TiO2 composite coating the mechanial property、crystallization orientation and electrochemiscal property of the composite coating to obtain the optimum electroplating parameters for manufacturing micro-mold. Taguchi method was employed high-aspect-ratio using in UV-LIGA process . The dispersion of nano TiO2 in the coating could be improved by using physics and chemical methods . In our experiment ,although the sodium 2-ethylhexyl sulfate was using as an wet agent ,it can also improved the dispersion of nano size TiO2 in Ni-Fe plating bath. The microhardness of Ni-Fe-TiO2 composite was about 800Hv, which was better than the 580 Hv of the Ni-Fe alloy. The composite interal increased stress with the TiO2 volume percent in the Ni-Fe-TiO2 composite .