标题: | 涡轮分子真空帮浦转子动态分析与轻量化设计 The Dynamic Analysis and Lightweight Design of Compound Turbo Molecular Pumps |
作者: | 曾建中 Chien-Chung Tseng 李安谦 An-Chen Lee 机械工程学系 |
关键字: | 动态分析;轻量化;复合式涡轮分子帮浦;有限元素法;Dynamic Analysis;Lightweight;Compound Turbo Molecular Pump;finite element analysis |
公开日期: | 2001 |
摘要: | 本文的主要目的是在分析复合式涡轮分子真空帮浦转子在旋转下的应力分布并求出转子的自然振动频率,在材料允许安全范围之下作轻量化设计之研究。 因实际转子为复合式之轴心,其轴心由镍铬钼钢及层状矽钢片所组成,由于要采用ANSYS模拟其复合式涡轮分子真空帮浦转子在旋转下的应力分布并求出转子的自然振动频率,故在模拟时,将其轴心化简为同一材料镍铬钼钢,减少繁杂的演算,以做到等效的结果,方便做为未来设计上的评估。藉由振动实验找出其实际的自然频率值做为依据来调整估算的设计尺寸。 最后分析帮浦转子在材料安全范围之内(包括强度、变形、共振频率),给予分子真空帮浦做轻量化设计。轻量化带来整体上重量的减轻,在材料成本的付出也相对的减少。 The purpose of this thesis to the article analyze the stress distribution of the rotor under rotating, find the natural frequency of the rotor of the compound turbo molecular pump, and make lightweight design under the range of safety of the materials. The shaft of rotor is compound, composed of Ni-Cr-Mo steel and laminar structure Si steel. We simplify the shaft to be single material with Ni-Cr-Mo steel to reduce the calculation so as to have identical effect in the future design. Then we find the actual natural frequency from vibration experiment. To adjust the shaft size accordingly to the natural frequency. Finally, lightweight design for the molecular vacuum pump within is proposed the safety region of the material of the rotor of the pump, including strength, deformation and resonance frequency. The design has the advantage to decrease the whole weight, and decrease the cost of the materials. |
URI: | http://140.113.39.130/cdrfb3/record/nctu/#NT900489102 http://hdl.handle.net/11536/69226 |
显示于类别: | Thesis |