建立半導體業廢水處理績效指標之研究

Abstract

本文利用層級分析法(AHP)應用於環境績效指標項目規劃與量化。並藉由名目尺度(Nominal Scale)1，３，…，9的比例尺度給與各評估指標間的相對量化重要性，並進行成對比較。問卷結果利用Expert Choice軟體來進行AHP資料分析，計算其特徵值(Eigenvalue)及優先向量(Priority Vector)與解釋可得到各評估準則間相對權重的大小。 利用此設計方法可將複雜的問題由不同的角度系統化，可建立廢水處理績效評估工具，並且透過不同族群問卷調查結果比對，瞭解利害相關團體及半導體業者本身對廢水處理代表性績效指標結果不盡相同，故需進行績效溝通。 問卷結果得到半導體廠廢水處理績效標的為「污染源管理」，績效考量構面著重於「線上回收設施規劃」與「廢水分流方式」。篩選出代表性與量化績效指標共11項分別為：異丙醇使用端回收、廠內用水回收、高濃度氟廢水分流、廢有機溶劑廠內再利用、水力停留時間控制、硫酸使用端回收、調勻池規格設計、多段式反應池規格設計、沉澱池規格設計、多段式酸鹼值調整、備用處理系統規劃。

The purpose of this study in using the Analytical Hierarchy Process are to identify the Performance Index and to quantity index.The weight comparisons for index evaluation utilize the nominal scale and set the matrix. The results of questionnaire analyzed by the expert choice software are utilized to calculate the Eigenvalue and Priority Vector. The result build up a assessment tool for environmental Performance Index for Wastewater Treatment by systematize the complicated problems from various views by disassembling them into different hierarchies.We also know the different opinion in Performance Index for Wastewater Treatment from different groups .So the environmental communication is very important. The performance target of wastewater treatment is set as the process pollution management. The performance aspects of wastewater treatment focus on the online recycling system and classification of waste streams. Top 11 items of the performance indicators of wastewater treatment are determined from total 54 items of preliminary selections. Finally, it is acknowledged that there must exist different recommendations on performance indicators of wastewater treatment among different parties. So the performance communication with interesting party is required.