表面聲波生物感測元件之製作與應用

Abstract

本研究利用壓電薄膜以半導體製程製作表面聲波生物感測元件，並嘗試其應用。表面聲波生物感測元件是一種製作於壓電薄膜上搭配指叉狀電極，藉由指叉狀電極激發表面聲波以作為生物感測之用途。表面聲波於壓電薄膜表面傳播，其聲波能量集中於壓電薄膜表面，具有好的質量敏感度，當波傳邊界發生輕微的改變時，即有聲波頻率與波速的變化。研究中將正常血清與癌症血清滴於表面聲波生物感測元件中的感測區，發現具有較高蛋白濃度癌症血清造成的元件中心頻率偏移量多於正常血清，得知生物檢體蛋白濃度越高造成中心頻率偏移越多之趨勢。

A surface acoustic wave biosensor fabricated by semiconductor manufacture process was developed, its application was tested. The surface acoustic wave biosensor is created by inter-digital transducers (IDTs) and photo-deposited on the surface of piezoelectric thin film. Surface acoustic wave exited by IDTs is used on bio-detection. Since its energy was concentrated on the film surface and it is mass sensitive when the wave propagates through samples. When propagation boundary had changed, the frequency and velocity of surface acoustic wave changed also. For application test, normal and cancer blood serums were dropped on the sensing zone of surface acoustic wave biosensor, and we found that cancer blood serum having high protein concentration caused more frequency shift than normal blood serum near the center-frequency of the device. We know as protein concentration increases, frequency shift of the device also increases.