標題: | Impact of Uniaxial Strain on Low-Frequency Noise in Nanoscale PMOSFETs |
作者: | Kuo, Jack J. -Y. Chen, William P. -N. Su, Pin 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
關鍵字: | Interface state;low-frequency noise;process-induced strain;trap density;tunneling attenuation length;uniaxial strained PMOSFET |
公開日期: | 1-六月-2009 |
摘要: | This letter investigates the low-frequency noise characteristics and reports a new mechanism for uniaxial strained PMOSFETs. Through a comparison of the input-referred noise and the trap density of the gate dielectric/semiconductor interface between co-processed strained and unstrained devices, it is found that the tunneling attenuation length for channel carriers penetrating into the gate dielectric is reduced by uniaxial strain. The reduced tunneling attenuation length may result in smaller input-referred noise, which represents an intrinsic advantage of low-frequency noise performance stemming from process-induced strain. |
URI: | http://dx.doi.org/10.1109/LED.2009.2020069 http://hdl.handle.net/11536/7161 |
ISSN: | 0741-3106 |
DOI: | 10.1109/LED.2009.2020069 |
期刊: | IEEE ELECTRON DEVICE LETTERS |
Volume: | 30 |
Issue: | 6 |
起始頁: | 672 |
結束頁: | 674 |
顯示於類別: | 期刊論文 |