廢切削液回收再利用可行性研究-以某太陽能廠晶圓製程為例

Abstract

太陽能產業為我國二兆雙星產業外，極具發展性之產業，且其屬於綠能產業，在全球能源趨於匱乏的狀況下，勢必為未來世界各國積極發展之產業之一；而太陽能製程前段之晶圓切磨過程產生大量之廢切削液，造成後續廢棄物處理困難，與處理費用高額負擔，降低企業競爭能力，本研究將針對某太陽能晶圓廠晶圓製程產出之切削廢液，進行回收再利用之可行性探討。 本研究將製程產出之切削廢液進行分流改管單獨收集後，進行其物理化學性質檢測分析，再透過燃燒、壓濾、蒸餾、離心等方式進行再利用可行性試驗，由試驗所得結果探討切削廢液回收再利用之可行性。 依據本研究結果，廢切削液透過壓濾後，可將固態物分離，所得之液態物可用於作為鍋爐燃燒之替代燃料；廢切削液透過壓濾與蒸餾後，所得之再生切削油用回原切片製程，品質尚不穩定；廢切削液透過離心、壓濾與蒸餾後，所得之再生切削油可作為染料塗裝業之調配溶劑，再生碳化矽可作為水泥製磚業之掺雜原料。

Besides semi-conductor and display industry, photovoltaic industry is a much potential industry in Taiwan. Because its characteristic is Green Energy-Saving Industry, and there are less and less resources in the world, each country should research and develop in photovoltaic process aggressively. There will be much more waste slurry from wire-saw process. These waste slurry are difficult to be treated, and the charge of treatment is costly. That will make photovoltaic industry much more cost burden and decrease its competitiveness. This study includes three methods on recycling of the waste slurry from wire-saw process at a solar wafer manufactory. The first work is collecting waste slurry individual. The second is analyzing the character of waste slurry. Then try to recycling of waste slurry according to filtration, distillation, and centrifugation. According to the result of this study, the oil of waste slurry after filtration can be to substitute for fuel of boiler. The solid of waste slurry after filtration and distillation can recycle back to wire-saw process, but its quality is still not steady. Waste slurry after filtration, distillation, and centrifugation, the renewable oil can be additive solvent to the industrial of dyes and paints, the renewable silicon carbide can be dopont to the industrial of cement and tile.