半導體廠貴金屬用量管理自動化系統之分析與建置 —以X公司為例

Abstract

在砷化鎵半導體晶圓代工產業中，貴金屬是價格極高的原物料，也常被拿來做廣泛的應用。在製造過程當中，貴金屬除了被蒸鍍於晶圓上，另外也會有一部分殘留於機台內，這些殘留的貴金屬品質是不變的，可以藉由回收再利用。如果公司無法有效率地統計這些貴金屬重量，將造成損失。另外如果這些貴金屬領用與耗用的情況都是透過人工作業來記錄與預估，在貴金屬使用量管理上也會造成風險。

隨著資訊科技的進步，可以藉由資訊系統來取代人工作業，讓所有資料都可以被記錄下來，也能用來進行大量運算與統計分析。因此本論文參考個案公司的貴金屬管理與使用流程，來設計出一套貴金屬用量管理系統。此系統將使用統一塑模語言來與使用者溝通討論，並參考快速應用系統開發理論作為開發基礎。本研究將以個案公司作為例子，實際建置應用此資訊系統，並整合相關儀器與設備所能提供的自動化功能與資訊，來達到可以協助企業更精確且更有效率地管控貴金屬使用情況的目的。

Not only is the precious metal widely used in many ways, but also is an expensive and key raw material in the GaAs semiconductor foundry industry. After the plating process in the manufacturing, in which the precious metal is mainly used, there is gold residues that remain in the equipment. Since the quality of these gold residues is the same after being issued to the production line, it can be recycled and reused in the production. If the corporation cannot manage and recycle the precious metal efficiently, it will cause unpredictable extra cost. On the other hand, if the quantity of the precious metal usage was merely estimated and recorded manually, it might cause some risk of precious metal lost.

As the improvement of information technology, manpower can be replaced by information systems. All the data can be recorded, calculated and analyzed by information systems. This study will design a precious metal usage management system by incorporating a case of the operation procedure in a GaAs semiconductor company. This system will utilize UML to discuss with users and use RAD procedure in development. Then this study will build the information system and integrate automation function and information of related electronic devices. The goal is to improve the effectiveness of managing and controlling the precious metal usage by using this information system.