標題: 利用原子力顯微術實現微奈米快速原型
Micro/Nano Rapid Prototype Utilizing Atomic Force Microscopy
作者: 蔡宗德
Tsai, Tzung-De
洪紹剛
Hung, Shao-Kang
機械工程系所
關鍵字: 原子力顯微術;微奈米快速原型;沾筆式奈米微影技術;Atomic Force Microscopy;Micro/Nano Rapid Prototyping;Dip-Pen Nanolithography
公開日期: 2012
摘要: 本論文研究目標是利用原子力顯微術 (Atomic Force Microscopy, AFM) 之原理,配合Akiyama探針(Akiyama-Probe)、三軸壓電位移平台與UV光硬化膠所設計出之微奈米快速原型系統,由於Akiyama探針針尖尺度約10奈米,因此由Akiyama探針進行沾膠點膠的動作,可達成具微奈米尺度的原型結構。 本研究之微奈米快速原型系統可製出直徑約1 µm、高度約200 nm的膠點結構,也可用於繪製線寬約1 µm之線狀結構,並於實驗過程找出了影響膠點大小與高度的三種控制變因,分別為繞圈沾膠、點膠停留時間以及沾膠針尖下降深度,而本微奈米快速原型系統可成功製出二維快速原型結構。
The goal of this research is using the principle of atomic force microscope (AFM), Akiyama probe, UV glue and a 3-axis piezoelectric stage to design the micro/nano rapid prototyping (RP) system. Because of the Akiyama probe's small size, we can use it to get the UV glue and make micro/nano-size structure. The micro/nano RP system can build the UV glue with diameter about 1 μm, and it can be used for drawing line with line width about 1 μm. The micro/nano RP system can build 2D rapid prototype structure successfully.
URI: http://140.113.39.130/cdrfb3/record/nctu/#GT070051064
http://hdl.handle.net/11536/72950
Appears in Collections:Thesis