龍門機器人之振動分析

Abstract

液晶顯示器(Liquid Crystal Display, LCD)的玻璃基板四周都需貼附覆晶薄膜(Chip on film, COF)，此高精度外引腳貼合設備就是龍門機器人(Gantry Robot)，龍門機器人常用於面板業和半導體產業封裝後IC的壓合作業。在壓合過程中，壓合頭移動、壓合皆會造成振動問題，危害IC電路腳位的正確連接。為了確保設備的高精度，並且作為改善機械設計的依據，本研究利用3D繪圖軟體Solidworks建立模型檔，再匯入數值分析軟體ANSYS Workbench做有限元素分析，模擬四個壓合頭在不同的位置時壓合之精度，執行靜態分析，計算各個部件變形量之數據和分佈。本研究執行模態分析，得到結構的自然振動頻率以及振型這兩個動態特徵參數，並將40個模態以模態疊加法計算出動態響應。進行實際機台量測，使用雷射位移計量測龍門機器人的動態行為，並利用其結果修正有限元素模型。最後根據暫態分析模擬結果，針對改善壓頭結構的設計，大幅改善壓頭在壓合時之精度，可提供未來龍門機器人設計改善之參考。

Along four sides of monitor screens, COFs have to be bonded. The so called gantry robot is a high precision outer lead bonding equipment. Gantry robots are commonly used in the bonding operation after IC packaging in panel industry and semiconductor industry. During the bonding process, bonder moving and bonding movement result in vibration and misalignment to IC pins. To ensure the bonding stability of gantry robots in high precision and as a basis to improve mechanical design, in this research, bonding models were first constructed and sent to ANSYS Workbench software to carry out the finite element analysis. Static structure simulation is carried out to compute the deformation of components when four bonders move to different positions. This study uses natural frequencies and mode shapes from modal analysis to characterize the dynamic response of the gantry robot. The mode superposition method sums 40 mode shapes for calculating dynamic response. In experiments, laser displacement sensors are used to measure vibration behavior of the gantry robot. The obtained results were used to set up a reliable finite element model. In this study, a design of bonders based on the results of vibration analysis has been proposed. It is shown that the proposed design performs well and provides engineers improvement and references in designing the gantry robot.