氮化鈦與鈦金屬界面反應之微觀結構分析

Abstract

氮化鈦(Titanium nitride, TiN)/鈦(Titanium, Ti)在1atm Ar氣氛下進行1000~1500℃各種不同時間之擴散反應，利用X光繞射(x-ray diffraction, XRD)、掃描式電子顯微鏡(scanning electron microscopy/energy dispersive spectroscopy, SEM/EDS)與穿透式電子顯微鏡(TEM/EDS)，分析擴散反應後界面之顯微結構。TiN/Ti在1000℃/36hrs界面反應後，反應生成物從TiN側至Ti側為ε-TiN(tetragonal)，經1300℃/36hrs擴散反應後，反應生成物從TiN側至Ti側依序為ε-TiN(tetragonal)與α-TiN0.3(hexagonal)，其中ε-TiN是經由包析反應所產生，在1400℃/36hrs擴散反應時，又析出針狀Ti2N，經過1500℃/36hrs擴散反應後，α-TiN0.3並沒出現，但卻在兩相區中出現長板狀的析出物α-Ti。

In this work, the interfacial reactions in the TiN/Ti diffusion couple were investigated. TiN/Ti diffusion couples were annealed at temperatures ranging from 1000 to 1500℃in argon atmosphere for 36hours. The microstructures of the reaction interface were characterized using x-ray diffraction (XRD), scanning electron microscopy (SEM), and analytical transmission electron microscopy (TEM/EDS). Phases of ε-TiN(tetragonal) was observed from TiN-side to Ti-side of the diffusion couple after reaction at 1000℃ for 36 hours. After reaction at 1300℃ for 36 hours , ε-TiN(tetragonal) and α-TiN0.3(hexagonal)were observed from TiN-side to Ti-side, and ε-TiN were formed by the peritectoid reaction. However, after reaction at 1400℃ for 36 hours, the needle-like Ti2N was precipitated. Finally, α-TiN0.3 did not exist after reaction at 1500℃ for 36 hours, but lath-like α-Ti was precipitated in the two-phase region.