標題: | Origin of hysteresis in current-voltage characteristics of polycrystalline silicon thin-film transistors |
作者: | Lin, Horng-Chih Hung, Cheng-Hsiung Chen, Wei-Chen Lin, Zer-Ming Hsu, Hsing-Hui Hunag, Tiao-Yuang 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
關鍵字: | deep levels;defect states;electron traps;elemental semiconductors;grain boundaries;hysteresis;interface states;silicon;thin film transistors |
公開日期: | 1-三月-2009 |
摘要: | In this work we report the observation and characterization of a hysteresis phenomenon in the transfer characteristics of n-channel polycrystalline silicon (poly-Si) thin-film transistors (TFTs). Such phenomenon is observed in devices with fully depleted channel and not treated with hydrogen-related anneal. The origin of the hysteresis is identified to be related to the electron trapping and detrapping processes associated with the deep-level traps in the grain boundaries of the poly-Si channel. |
URI: | http://dx.doi.org/10.1063/1.3086271 http://hdl.handle.net/11536/7585 |
ISSN: | 0021-8979 |
DOI: | 10.1063/1.3086271 |
期刊: | JOURNAL OF APPLIED PHYSICS |
Volume: | 105 |
Issue: | 5 |
結束頁: | |
顯示於類別: | 期刊論文 |