數值分析簡式橢偏儀中的偏光片及析光片之校正及更正

Abstract

本文將在簡式橢圓偏光儀 (Polarizer-Sample-Analyzer ellipsometer, PSA) 架構下介紹新的數值計算法，此新法可量測樣品之橢圓偏光參數、偏光片和析光片的方位角誤差。本文將証明此新法只需量測六個光強度，即可推算橢圓偏光參數、偏光片和析光片的方位角誤差。並用所測得之方位角誤差更正偏光片及析光片原點，修正樣品之橢圓偏光參數，進而推算薄膜的厚度和入射角。 我們僅用了六個光強度，即可校正橢圓偏光系統；並修正樣品之橢圓偏光參數。此數值計算法可求得較佳的薄膜光學參數，不但節省了量測的時間，並提高了其精確度。

This work presents a novel technique to determine the ellipsometric parameters and the azimuth deviations of the polarizer and analyzer in a polarizer- sample-analyzer ellipsometer. We will prove that this technique only needs six intensity measurements to extract the ellipsometric parameters and the azimuth deviations. The six intensity measurements is to perform two sets of this three-intensity measurement with the polarizer’s azimuth at 45o and -45o, respectively, we can obtain a set of ellipsometric parameters, which are free from the azimuth deviations of polarizer and analyzer. The ellipsometric parameters can be used to deduce the thickness of the thin film and incident angle. By this method, we can get the optimized parameters of the thin film, reduce the time of measurement, and raise its accuracy.